Development Of Cmos-memsnems Devices - MDPI AG

Micro And Nano-electro-mechanical System (mnems) Devices Constitute Key Technological Building Blocks To Enable Increased Additional Functionalities Within Integrated Circuits (ics) In The More-than-moore Era, As Described In The International Technology Roadmap For Semiconductors. The Cmos Ics And Mnems Dies Can Be Combined In The Same Package (sip), Or Integrated Within A Single Chip (soc). In The Soc Approach The Mnems Devices Are Monolithically Integrated Together With Cmos Circuitry Allowing The Development Of Compact And Low-cost Cmos-mnems Devices For Multiple Applications (physical Sensors, Chemical Sensors, Biosensors, Actuators, Energy Actuators, Filters, Mechanical Relays, And Others).