Micronano Integrated Fabrication Technology And Its Applications In Microenergy
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Micronano Integrated Fabrication Technology And Its Applications In Microenergy
This Book Presents A Universal Mass-production Micronano Integrated Fabrication Technology, Which Can Be To Realize Micronano Hierarchical Structures On Si-based Materials And Flexible Polymeric Materials. This Fabrication Technology Has Been Systematically Investigated By Using Experimental Measurements, Mechanism Analyses, Theoretical Simulations And So On. Three Common Materials (i.e., Silicon, Pdms And Parylene-c) With Micronano Hierarchical Structures Have Been Successfully Fabricated, Which Also Show Several Attractive Properties.
- 品牌: Springer Nature B.V
- 类别: 计算机与互联网
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语言: English
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作者: Xiao-Sheng Zhang
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出版日期: 2015-12-08
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页数: 144
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出版社／标签: Springer Nature B.V
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格式: Hardcover
- Fruugo ID: 557254385-1125524251
- ISBN: 9783662488140
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