Photomodulated Optical Reflectance A Fundamental Study Aimed At Non-destructive
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Photomodulated Optical Reflectance A Fundamental Study Aimed At Non-destructive
One Of The Critical Issues In Semiconductor Technology Is The Precise Electrical Characterization Of Ultra-shallow Junctions. Among The Plethora Of Measurement Techniques, The Optical Reflectance Approach Developed In This Work Is The Sole Concept That Does Not Require Physical, Making It Suitable For Non-invasive In-line Metrology. This Work Develops Extensively All The Fundamental Physical Models Of The Photomodulated Optical Reflectance Technique And Introduces Novel Approaches That Extend Its Applicability From Dose Monitoring Towards Detailed Carrier Profile Reconstruction.
- 品牌: Springer Nature B.V
- 类别: 计算机与互联网
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语言: English
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作者: Janusz Bogdanowicz
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出版日期: 2014-07-17
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页数: 228
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出版社／标签: Springer Nature B.V
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格式: Paperback
- Fruugo ID: 557251396-1125521260
- ISBN: 9783642426865
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