Spectroscopic Ellipsometry Practical Application To Thin Film Characterization - Harland G. Tompkins

Spectroscopic Ellipsometry Provides A Good Introduction To The Basic Theory Of The Technique And Its Common Applications.ellipsometry Is An Experimental Technique For Determining The Thickness And Optical Properties Of Thin Films. It Is Ideally Suited For Films Ranging In Thickness From Sub-nanometer To Several Microns. Spectroscopic Measurements Have Greatly Expanded The Capabilities Of This Technique And Introduced Its Use Into All Areas Where Thin Films Are Found: Semiconductor Devices, Flat Panel And Mobile Displays, Optical Coating Stacks, Biological And Medical Coatings, Protective Layers, And More.while Several Scholarly Books Exist On The Topic, This Book Provides A Good Introduction To The Basic Theory Of The Technique And Its Common Applications.